Design, Simulation and Fabrication of Platinum based Micro-heater for Gas Sensing Application
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
Design, Simulation and Fabrication of Platinum based
Micro-heater for Gas Sensing Application
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| Creator |
Prasad, M
Arora, N Khanna, VK |
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| Subject |
MEMS and Microsensors
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| Description |
The paper presents the design, simulation and
fabrication of Platinum (Pt) based Microhotplate for
gas sensing application. In order to reduce the power
consumption, various geometries of microhotplate were
simulated using ANSYS. Based on power consumption
and average temperature distribution, double spiral
pattern of microheater was selected. A Pt resistor of 30
Ω is fabricated on a thin SiO2 membrane. Electrical
testing of microhotplate was performed. A temperature
of 520 °C was achieved at 19 mW power consumption.
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| Date |
2013
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://ceeri.csircentral.net/61/1/29_2012%288%29.pdf
Prasad, M and Arora, N and Khanna, VK (2013) Design, Simulation and Fabrication of Platinum based Micro-heater for Gas Sensing Application. In: International Conference on Emerging Technologies : Micro to Nano 2013 (ETMN-2013), February 23-24, 2013, BITS, Pilani, K.K. Birla Goa Campus, Goa. (Submitted) |
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| Relation |
http://ceeri.csircentral.net/61/
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