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Analytical Modeling and Design Optimization of UV-LIGA based 4-DOF Vibratory Gyroscope

IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani

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Field Value
 
Title Analytical Modeling and Design Optimization of UV-LIGA based 4-DOF Vibratory Gyroscope
 
Creator Jain, A
Gopal, R
 
Subject MEMS and Microsensors
 
Description This paper presents analytical modeling and design optimization of structurally decoupled 4-DOF vibratory gyroscope with increased robustness and gain. The proposed design utilizes dynamic amplification in 2-DOF drive mode oscillator and 2-DOF sense mode oscillator to achieve large gain. Equations of motion are derived for the gyroscope using vector method and the same are verified by lagrangian dynamics. The equations are solved analytically both in frequency domain and time domain to obtain the device’s characteristics. The design is optimized to meet the desired specifications and to be compatible with UV-LIGA fabrication technique having 10
 
Date 2013
 
Type Conference or Workshop Item
PeerReviewed
 
Format application/pdf
 
Identifier http://ceeri.csircentral.net/63/1/29_2012%2810%29.pdf
Jain, A and Gopal, R (2013) Analytical Modeling and Design Optimization of UV-LIGA based 4-DOF Vibratory Gyroscope. In: International Conference on Emerging Technologies : Micro to Nano 2013 (ETMN-2013), February 23-24, 2013, BITS, Pilani, K.K. Birla Goa Campus, Goa. (Submitted)
 
Relation http://ceeri.csircentral.net/63/