Analytical Modeling and Design Optimization of UV-LIGA based 4-DOF Vibratory Gyroscope
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive InfoField | Value | |
Title |
Analytical Modeling and Design Optimization of
UV-LIGA based 4-DOF Vibratory Gyroscope
|
|
Creator |
Jain, A
Gopal, R |
|
Subject |
MEMS and Microsensors
|
|
Description |
This paper presents analytical modeling and design
optimization of structurally decoupled 4-DOF vibratory
gyroscope with increased robustness and gain. The
proposed design utilizes dynamic amplification in 2-DOF
drive mode oscillator and 2-DOF sense mode oscillator to
achieve large gain. Equations of motion are derived for the
gyroscope using vector method and the same are verified
by lagrangian dynamics. The equations are solved
analytically both in frequency domain and time domain to
obtain the device’s characteristics. The design is optimized
to meet the desired specifications and to be compatible
with UV-LIGA fabrication technique having 10
|
|
Date |
2013
|
|
Type |
Conference or Workshop Item
PeerReviewed |
|
Format |
application/pdf
|
|
Identifier |
http://ceeri.csircentral.net/63/1/29_2012%2810%29.pdf
Jain, A and Gopal, R (2013) Analytical Modeling and Design Optimization of UV-LIGA based 4-DOF Vibratory Gyroscope. In: International Conference on Emerging Technologies : Micro to Nano 2013 (ETMN-2013), February 23-24, 2013, BITS, Pilani, K.K. Birla Goa Campus, Goa. (Submitted) |
|
Relation |
http://ceeri.csircentral.net/63/
|
|