Nonlinear Characterization of Microcantilever based Force Sensor using Nanomanipulator System
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
Nonlinear Characterization of Microcantilever based
Force Sensor using Nanomanipulator System
|
|
| Creator |
Sharma, HD
Pal, T |
|
| Subject |
IC Design
|
|
| Description |
In this paper authors present development of a
characterization process for Microcantilever based piezo-resistive
force-sensor wherein fusion of real-time vision and force feedback
has been used with a nanomanipulator (MM3A R
) system. The
system works with MM3A nanomanipulator, it applies definite
forces in range of 10-80 �N on the force sensor and resulting
deflection produces voltage which is directly measured on oscilloscope.
Deflection values have been recorded using images
captured by CCD camera mounted on a light microscope. The
sensor characterization is carried out which considers third order
nonlinear behavior in cantilever based piezo resistive force sensor
output. The sensor behavior has been studied using both linear
assumption and third order nonlinear system, which shows upto
20% of output is produced by nonlinearity term. Therefore
it is significant contribution in the sensor, which cannot be
treated negligible. The sensitivity of force sensor found out
18.79mV=�N with linear model whereas with nonlinear model,
Linear and Cubic coefficients are 14.75 mV=�N and 0.681
�V=�N3 respectively.
|
|
| Date |
2010
|
|
| Type |
Conference or Workshop Item
PeerReviewed |
|
| Format |
application/pdf
|
|
| Identifier |
http://ceeri.csircentral.net/72/1/08_2010_%282%29.pdf
Sharma, HD and Pal, T (2010) Nonlinear Characterization of Microcantilever based Force Sensor using Nanomanipulator System. In: 36th Annual Conference of IEEE Industrial Electronics (IECON-2010) , November 7-10, 2010, Phoenix, Arizona, USA. (Submitted) |
|
| Relation |
http://ceeri.csircentral.net/72/
|
|