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Effect of RF Power on the Composition of the Sputtered Thin Film Deposition

IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani

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Title Effect of RF Power on the Composition of the Sputtered Thin Film Deposition
 
Creator Kumar, M
Swami, A
Sharma, JVNR
Laxmi, S
Kumar, P
Khanna, VK
 
Subject MEMS and Microsensors
 
Description To sputter deposit the thin film of Al-Si-Cu of the same composition as that of the target, one has to optimize the sputtering process parameter like Argon gas pressure, gap between the sample and the target, sputtering power. We have deposited the sputtered thin film of Al-Si-Cu using RF magnetron sputtering having the same composition as that of the target, keeping RF sputtering power as the main parameter. We have also optimized the sputtering process to achieve good uniformity, step coverage and reproducibility. To characterize the sputtered thin film we have used surface profiler, scanning electron microscope and wet chemical etching. Large numbers of experiments were carried out and the result is presented in this paper.
 
Date 2010
 
Type Conference or Workshop Item
PeerReviewed
 
Format application/msword
 
Identifier http://ceeri.csircentral.net/102/1/11_2010_%28ii%29.doc
Kumar, M and Swami, A and Sharma, JVNR and Laxmi, S and Kumar, P and Khanna, VK (2010) Effect of RF Power on the Composition of the Sputtered Thin Film Deposition. In: International Conference on Nanosensors & Technology (ICNST 2010), October 28-30, 2010, CSIO, Chandigarh. (Submitted)
 
Relation http://ceeri.csircentral.net/102/