Design and Simulation of Pt-based Microhotplate, and Fabrication of Suspended Dielectric Membrane by Bulk Micromachining
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
Design and Simulation of Pt-based Microhotplate, and Fabrication of Suspended Dielectric Membrane by Bulk Micromachining
|
|
| Creator |
Prasad, M
Yadav, RP Sahula, V Khanna, VK |
|
| Subject |
MEMS and Microsensors
|
|
| Description |
The paper presents the design and simulation of double spiral Pt-based microhotplate (MHP) for gas sensing
application. A platinum resistor of 52 has been designed and simulated on a 0.3 micron thick SiO2 suspended membrane of size 40 × 40 μm2 using ANSYS. The SiO2 membrane of size 40 × 40 μm2 and thickness 0.3 micron has been fabricated successfully by bulk micromachining in <100> orientation P-type silicon using 25% tetra methyl ammonium hydroxide (TMAH) solution. The simulated temperature and transit time response of microhotplate were obtained as 600.5 °C and 0.2 ms respectively at 4.8 mW power consumption.
|
|
| Date |
2011
|
|
| Type |
Conference or Workshop Item
PeerReviewed |
|
| Format |
application/pdf
|
|
| Identifier |
http://ceeri.csircentral.net/165/1/20_2011%284%29.pdf
Prasad, M and Yadav, RP and Sahula, V and Khanna, VK (2011) Design and Simulation of Pt-based Microhotplate, and Fabrication of Suspended Dielectric Membrane by Bulk Micromachining. In: 16th International Workshop on the Physics of Semiconductor Devices (IWPSD - 2011), December 19 - 22, 2011, IIT Kanpur, India. (Submitted) |
|
| Relation |
http://ceeri.csircentral.net/165/
|
|