Design of Piezoresistive MEMS Absolute Pressure Sensor
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
Design of Piezoresistive MEMS Absolute Pressure Sensor
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| Creator |
Kumar, SS
Pant, BD |
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| Subject |
MEMS and Microsensors
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| Description |
Piezoresistivity involves change of electrical resistance due to an applied stress or strain. Piezoresistive pressure sensors involve using this property of Piezoresistivity to measure the applied pressure. In the present work, the design and optimization of 30 Bar range pressure sensor is carried out using CoventorWare CAD tool. Also the accuracy of Numerical (FEM) solution over the conventional analytical approach for such high pressure ranges is shown.
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| Date |
2011
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://ceeri.csircentral.net/167/1/20_2011%285%29.pdf
Kumar, SS and Pant, BD (2011) Design of Piezoresistive MEMS Absolute Pressure Sensor. In: 16th International Workshop on the Physics of Semiconductor Devices (IWPSD - 2011), December 19 - 22, 2011, IIT Kanpur, India. (Submitted) |
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| Relation |
http://ceeri.csircentral.net/167/
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