MEMS Magnetic Field Sensor Based on Magnetoelectric FeCo/ZnO Thin Films
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
MEMS Magnetic Field Sensor Based on Magnetoelectric FeCo/ZnO Thin Films
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| Creator |
Singh, J
Kumar, R Kumar, A Das, S Kothari, P Arout, CJ |
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| Subject |
MEMS and Microsensors
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| Description |
We have developed a microelectromechanical systems (MEMS) based magnetic field sensor utilizing FeCo/ZnO magetoelectric thin films. The micro-cantilever beam stack consists of Si/SiO2/Pt/ZnO/Pt/FeCo multilayers for
self-actuation and sensing of devices. The mechanical
resonance frequency of sensor was experimentally observed at 10.45 kHz measured using laser Doppler vibrometer (LDV). The sensor and quality factor was obtained ~593. The sensor lateral dimension was 1360µmx180µm and overall layer stack thickness was 7.9 µm. The packaged device dimension measured was 20mmx1Omm. Device sensing performance was measured using a customized magetoelectric measurement set-up and magnetic field sensitivity was 57.6 mV/Gauss in an unshielded environment. The proposed sensor has key advantages such as small size, light weight, low cost, non-invasive and high resolution.
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| Date |
2018
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://ceeri.csircentral.net/604/1/35-2018.pdf
Singh, J and Kumar, R and Kumar, A and Das, S and Kothari, P and Arout, CJ (2018) MEMS Magnetic Field Sensor Based on Magnetoelectric FeCo/ZnO Thin Films. In: 4th IEEE International Conference on Emerging Electronics (ICEE-2018), December 16-19, 2018, Royal Orchid Resort, Yelahanka, Bengaluru . |
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| Relation |
http://ceeri.csircentral.net/604/
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