Thermal analysis of cantilever MEMS based Low power microheater array for the selective detection of explosive and toxic gases
IR@CGCRI: CSIR-Central Glass and Ceramic Research Institute, Kolkata
View Archive Info| Field | Value | |
| Title |
Thermal analysis of cantilever MEMS based Low power microheater array for the selective detection of explosive and toxic gases
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| Creator |
Ghosh, S
Chatterjee, S Kundu, A Maity, S Saha, H |
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| Subject |
Electronics
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| Description |
A cantilever type microheater array consisting of four individual isolated microheaters on single die has been designed here for MEMS based gas sensor platform using metal oxide semiconductor for different gas detection through a single sensor die for explosive and toxic gas analysis in the underground manhole. A thin SiO 2/Si 3N 4 cantilever of 250μn X 100μn has been designed here for low power consumption and uniform temperature distribution throughout the entire active area. As the microheaters are isolated from each other, different temperatures may be achieved by applying different voltages in different heaters. © 2012 IEEE.
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| Date |
2012-03
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://cgcri.csircentral.net/1873/1/avra.pdf
Ghosh, S and Chatterjee, S and Kundu, A and Maity, S and Saha, H (2012) Thermal analysis of cantilever MEMS based Low power microheater array for the selective detection of explosive and toxic gases. In: 1st International Symposium on Physics and Technology of Sensors, ISPTS-1, 8 -10 March, 2012, Pune. |
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| Relation |
http://www.scopus.com/inward/record.url?eid=2-s2.0-84866385984&partnerID=40&md5=48475457ea5c5d152e6325bc5dd4f2a1
http://cgcri.csircentral.net/1873/ |
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