Design and Modeling of Piezo MEMS Pressure Sensor
IR@NAL: CSIR-National Aerospace Laboratories, Bangalore
View Archive Info| Field | Value | |
| Title |
Design and Modeling of Piezo MEMS Pressure Sensor
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| Creator |
Soma, Dutta
Mohammed , Yakub Shubha, V |
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| Subject |
Chemistry and Materials (General)
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| Description |
This paper presents modeling and analysis of piezoelectric membrane based pressure sensor to study its behavior under the influence of external pressure for variable membrane thickness. The size of the square membrane is 1.5×1.5 mm2 with PZT layer thickness ~1 µm. The PZT layer is sandwiched between a bottom electrode and a top electrode layer. In addition, there is 600 nm thick layer of SiO2 in-between silicon layer and bottom electrode, which serves as a diffusion barrier. With this design geometry the pressure sensor can safely be operated upto a maximum pressure of 10mbar for a particular membrane thickness.
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| Publisher |
Indian Institute of Science
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| Date |
2012
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/msword
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| Identifier |
http://nal-ir.nal.res.in/11588/1/Design_and_Modeling_of_Piezo_MEMS_Pressure_Sensor.docx
Soma, Dutta and Mohammed , Yakub and Shubha, V (2012) Design and Modeling of Piezo MEMS Pressure Sensor. In: Processing ISSS. |
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| Relation |
http://nal-ir.nal.res.in/11588/
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