Deposition and optoelectronic properties of ITO (In2O3:Sn) thin films by Jet nebulizer spray (JNS) pyrolysis technique
IR@CECRI: CSIR-Central Electrochemical Research Institute, Karaikudi
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| Title |
Deposition and optoelectronic properties of ITO (In2O3:Sn) thin films by Jet nebulizer spray (JNS) pyrolysis technique
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| Creator |
Sethupathi, N.
Thirunavukkarasu, P. Vidhya, V.S. Thangamuthu, R. Kiruthika, G.V.M. Perumal, K. Bajaj, H.C. Jayachandran, M. |
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| Subject |
Electrochemical Materials Science
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| Description |
Nanocrystalline ITO thin films were deposited
on glass substrates by a new spray pyrolysis route, Jet
nebulizer spray (JNS) pyrolysis technique, for the first time
at different substrate temperatures varying from 350 to
450 �C using a precursor containing indium and tin solution
with 90:10 at% concentration. The structural, optical
and electrical properties have been investigated as a
function of temperature. X-ray diffraction analysis showed
that the deposited films were well crystallized and polycrystalline
with cubic structure having (222) preferred
orientation. The optical band gap values calculated from
the transmittance spectra of all the ITO films showed a blue
shift of the absorbance edge from 3.60 to 3.76 eV revealing
the presence of nanocrystalline particles. AFM analysis
showed uniform surface morphology with very low surface
roughness values. XPS results showed the formation of ITO
films with In3? and Sn4? states. TEM results showed the
nanocrystalline nature with grain size about 12-15 nm and
SAED pattern confirmed cubic structure of the ITO films.
The electrical parameters like the resistivity, mobility and
carrier concentration are found as 1.82 9 10-3 X cm,
8.94 cm2/Vs and 4.72 9 1020 cm-3, respectively for ITO
film deposited at 400 �C. These results show that the ITO
films, prepared using the new JNS pyrolysis technique, have
the device quality optoelectronic properties when deposited
under the proposed conditions at 400 �C.
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| Publisher |
Springer
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| Date |
2012
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| Type |
Article
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://cecri.csircentral.net/3034/1/047-2012.pdf
Sethupathi, N. and Thirunavukkarasu, P. and Vidhya, V.S. and Thangamuthu, R. and Kiruthika, G.V.M. and Perumal, K. and Bajaj, H.C. and Jayachandran, M. (2012) Deposition and optoelectronic properties of ITO (In2O3:Sn) thin films by Jet nebulizer spray (JNS) pyrolysis technique. Journal of Materials Science: Materials Electronics, 23. pp. 1087-1093. |
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| Relation |
http://cecri.csircentral.net/3034/
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