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Field emission from as grown and nitrogen incorporated tetrahedral amorphous carbon/silicon heterojunctions grown using a pulsed filtered cathodic vacuum arc technique

IR@NPL: CSIR-National Physical Laboratory, New Delhi

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Title Field emission from as grown and nitrogen incorporated tetrahedral amorphous carbon/silicon heterojunctions grown using a pulsed filtered cathodic vacuum arc technique
 
Creator Panwar, O. S.
Rupesinghe, Nalin
Amaratunga, G. A. J.
 
Subject Engineering
Physics
 
Description This article reports the field emission measurements on as grown tetrahedral amorphous carbon (ta-C) and nitrogen incorporated tetrahedral amorphous carbon (ta-C: N) filmsgrown using a pulsed filtered cathodic vacuum arc technique. The effect of varying thickness on field emission in the as grown ta-C films and the effect of varying nitrogen content in ta-C: N films have also been studied. The values of threshold field of emission (Eturnon) increase with decrease of thickness in the as grown ta-C films. Nitrogen incorporation up to 5.2at.% in ta-C films decreases the value of Eturnon from 9.9to5.1V/μm and thereafter it starts increasing again. To understand the mechanism of electron emission, a realistic energy band diagram of ta-C:N/n++Si heterojunction has been proposed from the experimentally measured valence and conduction band offsets, using in situ x-ray photoelectron spectroscopy and optical spectroscopy data already published in DRM 9 (2000) 1148. The data are explained using the Fowler and Nordheim theory. The field emission results obtained reveal that there exists a barrier to emission and the main barrier is at the front surface and this is related to the conduction band offset of the ta-C:N/n++Si heterojunction.
 
Publisher American Institute of Physics
 
Date 2008-03
 
Type Article
PeerReviewed
 
Format application/pdf
 
Identifier http://npl.csircentral.net/1030/1/96.pdf
Panwar, O. S. and Rupesinghe, Nalin and Amaratunga, G. A. J. (2008) Field emission from as grown and nitrogen incorporated tetrahedral amorphous carbon/silicon heterojunctions grown using a pulsed filtered cathodic vacuum arc technique. Journal of Vacuum Science and Technology B , 26 (2). 566-575 . ISSN 1520-8567
 
Relation http://dx.doi.org/10.1116/1.2884762
http://npl.csircentral.net/1030/