Structure and indentation behavior of nanocomposite Ti–B–N films
IR@NML: CSIR-National Metallurgical Laboratory, Jamshedpur
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Title |
Structure and indentation behavior of nanocomposite Ti–B–N films
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Creator |
Rupa, P K P
Chakraborti, P C Mishra, Suman K |
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Subject |
Materials Science
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Description |
Titanium–boron–nitrogen (Ti–B–N) films were deposited by DC reactive magnetron sputtering using single titanium
diboride (TiB2) target in argon, argon–nitrogen mixtures and pure nitrogen gas. The effects of nitrogen incorporation
on the microstructure and mechanical properties of the deposited films were investigated. The films were
characterized by X-ray diffraction, atomic force microscope, scanning electron microscope, and X-ray photoelectron spectroscopy. Under pure argon the films showed the formation of TiB2. The films deposited in Ar–N2 mixture showed a transition from a hexagonal P6/mmm structure of TiB2 to the cubic (Fm3m) one of TiN and then again to hexagonal P6/mmm structure of TiB2 with decreasing nitrogen partial pressure. TiN was the major crystalline phase for the films deposited in pure nitrogen gas. Mechanical properties of the films were evaluated by nano indentation. The hardness varied from 45 GPa for pure TiB2 films to 11.15 GPa for Ti–B–N films. The energy of indentation analysis from the load–depth curves, % elastic recovery (%Er) and plots of H3/E2, where H is hardness and E is elastic modulus, at different indentation depths has been used to study the Ti–B–N film deformation process.
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Publisher |
Elsevier
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Date |
2014
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Type |
Article
PeerReviewed |
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Format |
application/pdf
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Identifier |
http://eprints.nmlindia.org/7007/1/P._Karuna_Purnapu_Rupa%5D_2014_160_169.pdf
Rupa, P K P and Chakraborti, P C and Mishra, Suman K (2014) Structure and indentation behavior of nanocomposite Ti–B–N films. Thin Solid Films, 564 (IF-1.867). pp. 160-169. |
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Relation |
http://www.sciencedirect.com/science/article/pii/S0040609014006269
http://eprints.nmlindia.org/7007/ |
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