A Test Structure for In-situ Determination of Residual Stress
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
A Test Structure for In-situ Determination of Residual Stress
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| Creator |
Sharma, A
Bansal, D Rangra, KJ Kumar, D |
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| Subject |
Sensors and Nanotechnology
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| Description |
This work presents a lancet type residual stress measurement test structure which comprises of a pair of bent beams along with cantilevers as driving bars for the rotational pointer structure. The residual stress causes the bent beams to deflect each other, thereby magnifying the pointer deflection. The pointer deflection direction indicates the type of stress (compressive or tensile), with the displacement being independent of Young’s modulus and film thickness. Finite element modeling is also used to analyze the structure and is compared with experimental results of electroplated Au structures.
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| Date |
2012
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://ceeri.csircentral.net/51/1/09_2012.pdf
Sharma, A and Bansal, D and Rangra, KJ and Kumar, D (2012) A Test Structure for In-situ Determination of Residual Stress. In: IEEE Sensors 2012, October 28 - 31, 2012 , Taipei, Taiwan. (Submitted) |
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| Relation |
http://ceeri.csircentral.net/51/
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