Restoration of perovskite phase in the top layer of thin BTO film by plasma treatment and annealing
IR@CGCRI: CSIR-Central Glass and Ceramic Research Institute, Kolkata
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| Title |
Restoration of perovskite phase in the top layer of thin BTO film by plasma treatment and annealing
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| Creator |
Sengupta, Subhamita
Ghatak, Ankita Sett, Shaili Sreemany, Monjoy Bysakh, Sandip Ghosh, Barnali Raychaudhuri, A K |
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| Subject |
Engineering Materials
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| Description |
We report a simple method to restore the perovskite phase in the top surface/sub-surface region of a thin film (similar to 100 nm) of barium titanate (BTO) fabricated by pulsed laser deposition on a platinized silicon surface and thus enhance its dielectric and ferroelectric properties. Phase evolution, surface morphology with local chemical composition of as-grown BTO films have been studied as a function of laser fluence. Investigations using x-ray diffraction, grazing-angle incidence x-ray diffraction and depth resolved x-ray photoelectron spectroscopy show that even after achieving a good phase formation there can be a presence of non-perovskite TiO2 phase at the surface and subsurface in such films that degrades its dielectric and ferroelectric response. The restoration of the degraded top layer was done by a combination of low energy Ar plasma treatment followed by an annealing process that enhances Ba content.
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| Publisher |
Institute of Physics
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| Date |
2018-02
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| Type |
Article
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://cgcri.csircentral.net/4317/1/mita.pdf
Sengupta, Subhamita and Ghatak, Ankita and Sett, Shaili and Sreemany, Monjoy and Bysakh, Sandip and Ghosh, Barnali and Raychaudhuri, A K (2018) Restoration of perovskite phase in the top layer of thin BTO film by plasma treatment and annealing. Journal of Physics D-Applied Physics, 51 (8). Article No-085304. ISSN 0022-3727 |
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| Relation |
http://cgcri.csircentral.net/4317/
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