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Investigation of Screening Effect of Bio-molecules on pH Sensitivity of SOI-ISFET Biosensor

IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani

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Title Investigation of Screening Effect of Bio-molecules on pH Sensitivity of SOI-ISFET Biosensor
 
Creator Padhye, M
Sinha, S
Mukhiya, R
Sharma, R
Khanna, VK
 
Subject MEMS and Microsensors
 
Description Abstract. A behavioral iuacroniodel of the SOI-ISFET has been developed in HSPICE” to simulate the electrol e- oxide-semiconductor structure of the ISFET in a solution with an additional membrane layer. This paper studies the Debye screening of bio-molecules and its effect on the single-gate sensitivity as well as dual-gate sensitivity of the SOI- ISFET based biosensor using the macrornodel developed. The analysis has been done for different sensing materials for the ISFET such as SiO„ Si,N‹ and AI,O,
 
Date 2019-11-29
 
Type Conference or Workshop Item
PeerReviewed
 
Format application/pdf
 
Identifier http://ceeri.csircentral.net/325/1/19-2017.pdf
Padhye, M and Sinha, S and Mukhiya, R and Sharma, R and Khanna, VK (2019) Investigation of Screening Effect of Bio-molecules on pH Sensitivity of SOI-ISFET Biosensor. In: 3rd International Conference on Emerging Technologies: Micro to Nano (ETMN-2017), October 6-7, 2017, Solapur. (Submitted)
 
Relation http://ceeri.csircentral.net/325/