Dual-axis Lorentz Force MEMS Magnetometer
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
Dual-axis Lorentz Force MEMS Magnetometer
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| Creator |
Aditi, Ms.
Das, S Kothari, P Das, S Gopal, R |
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| Subject |
MEMS and Microsensors
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| Description |
This paper presents a dual axis MEMS magnetometer, utilizing two DOF torsional gyroscope structure. The designed structure is a torsional resonator with two
gimbals. A single structure can detect magnetic field in two directions. The first and second mode of vibrations are the desired mode of operation for detecting the magnetic field in x and y directions. The first and second modes of vibrations are at 107 kHz and 187 kHz respectively. The device is tested for its Lorentz force transduction using MSA-500 in the presence of magnetic field generated using permanent magnet for both the
axes at atmospheric pressure. The fabrication process is based on anodic bonding (<400°C) of a borofloat glass wafer and double side polished (DSP) Si wafer, which enables the passivation between Gold loop and Silicon.
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| Date |
2020
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://ceeri.csircentral.net/549/1/472019.pdf
Aditi, Ms. and Das, S and Kothari, P and Das, S and Gopal, R (2020) Dual-axis Lorentz Force MEMS Magnetometer. In: IEEE Sensors Applications Symposium (SAS-2020), March 9-11, 2020, Kuala Lumpur, Malaysia. |
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| Relation |
http://ceeri.csircentral.net/549/
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