Emulation of MEMS Capacitive Sensor for CMOS Interface Circuit Validation
IR@CEERI: CSIR-Central Electronics Engineering Research Institute, Pilani
View Archive Info| Field | Value | |
| Title |
Emulation of MEMS Capacitive Sensor for CMOS Interface Circuit Validation
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| Creator |
Joshi, P
Singhal , N Santosh, M Bandyopadhyay, A Paliwal, S Mukhiya, R Bose, SC |
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| Subject |
Sensors and Nanotechnology
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| Description |
A MEMS capacitive sensor is emulated on a PCB for quick validation of CMOS interface circuit. In capacitive sensor, capacitance changes with external force; to mimic similar changes, controlled magnetic field is applied on emulated PCB capacitor. The dimension optimizations of interdigital capacitor are performed using CST software. The simulated values are milled on a FR4 sheet to make PCB capacitor. The simulated
capacitance values are cross checked by making measurement using LCR meter on PCB capacitor and have a deviation of 6.5%. The complete MEMS emulator consists of PCB capacitor, permanent magnet controlled by screw gauge and gauss meter. A minimum change of 50 aF achieved over a base capacitance 1.9 pF.
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| Date |
2020
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Format |
application/pdf
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| Identifier |
http://ceeri.csircentral.net/564/1/152020.pdf
Joshi, P and Singhal , N and Santosh, M and Bandyopadhyay, A and Paliwal, S and Mukhiya, R and Bose, SC (2020) Emulation of MEMS Capacitive Sensor for CMOS Interface Circuit Validation. In: 17th IEEE India Council International Conference (INDICON-2020), December 11-13, 2020, NSUT, New Delhi, India. |
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| Relation |
http://ceeri.csircentral.net/564/
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