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Spectroscopic ellipsometric characterization of TiAlN/TiAlON/Si3N4 tandem absorber for solar selective applications

IR@NAL: CSIR-National Aerospace Laboratories, Bangalore

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Title Spectroscopic ellipsometric characterization of TiAlN/TiAlON/Si3N4 tandem absorber for solar selective applications
 
Creator Biswas, A
Bhattacharya, D
Barshilia, Harish C
Selvakumar, N
Rajam, KS
 
Subject Solar Energy
Optics
 
Description Sputter deposited TiAlN/TiAlON/Si3N4 tandem absorber has been characterized by spectroscopic ellipsometry in the wavelength range of 450-1200 nm. Each layer of the tandem absorber viz., TiAlN, TiAlON and Si3N4 has been deposited separately on copper substrate (Cu) and ellipsometric measurements have been carried out on each of these layers. The measured ellipsometric spectra were fitted with theoretically simulated spectra and the sample structure and wavelength dispersion of optical constants of each layers have been determined. The ellipsometric measurements have also been carried out on the three-layer tandem absorber deposited on Cu substrate. By analyzing the ellipsometric data, depth profiling of the tandem absorber has been carried out using the derived optical constants of the individual layers.
 
Publisher Elsevier Publisher
 
Date 2008
 
Type Journal Article
PeerReviewed
 
Relation http://linkinghub.elsevier.com/retrieve/pii/S0169433207010513
http://nal-ir.nal.res.in/9721/
 
Identifier Biswas, A and Bhattacharya, D and Barshilia, Harish C and Selvakumar, N and Rajam, KS (2008) Spectroscopic ellipsometric characterization of TiAlN/TiAlON/Si3N4 tandem absorber for solar selective applications. Applied Surface Science, 254 . pp. 1694-1699. ISSN 0042-207X