Thermo-Mechanical response of an electrically driven micro-actuator
IR@NAL: CSIR-National Aerospace Laboratories, Bangalore
View Archive Info| Field | Value | |
| Title |
Thermo-Mechanical response of an electrically driven micro-actuator
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| Creator |
Dutta, Soma
Raja, S Shashikala, Rajappa |
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| Subject |
Aeronautics (General)
Mechanical Engineering |
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| Description |
Thermo-mechanical response of a polysilicon beam structured two hot arm horizontal actuators are investigated under electrical load. This thermo-mechanical device is operated by differential thermal expansion caused by resistive Joule heating to generate thermal expansion and movement. The present research demonstrates a good comprehension of the phenomena during Joule heating process for micro systems and the development of an analytical model and a finite element analysis. Numerically simulated results validate the analytical model at the steady state conditions. This simple device can generate a temperature of 1389K and produce a deflection of the order of 12μm at the level of low operating voltage (10 volts).
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| Date |
2005
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| Type |
Conference or Workshop Item
PeerReviewed |
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| Identifier |
Dutta, Soma and Raja, S and Shashikala, Rajappa (2005) Thermo-Mechanical response of an electrically driven micro-actuator. In: International Conference on MEMS and Semiconductor Nanotechnology , 2005, IIT, Kharagpur, India.
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| Relation |
http://nal-ir.nal.res.in/9779/
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