MEMS: An Overview
IR@NAL: CSIR-National Aerospace Laboratories, Bangalore
View Archive Info| Field | Value | |
| Title |
MEMS: An Overview
|
|
| Creator |
Dutta, Soma
Shubha, V |
|
| Subject |
Aeronautics (General)
Chemistry and Materials (General) Electronics and Electrical Engineering |
|
| Description |
Micro-Electro-Mechanical Systems, or MEMS, are integrated micro devices or systems combining electrical and mechanical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from micrometers to millimeters. These systems can sense, control and actuate on the micro scale and function individually or in arrays to generate effects on the macro scale. This report presents an overview of MEMS technology with a special emphasis on piezo MEMS.
|
|
| Publisher |
National Aerospace Laboratories
|
|
| Date |
2009
|
|
| Type |
Proj.Doc/Technical Report
NonPeerReviewed |
|
| Identifier |
Dutta, Soma and Shubha, V (2009) MEMS: An Overview. Project Report. National Aerospace Laboratories, Bangalore, India.
|
|
| Relation |
http://nal-ir.nal.res.in/9783/
|
|