Modelling and Analysis of MEMS Thermal Actuator
IR@NAL: CSIR-National Aerospace Laboratories, Bangalore
View Archive Info| Field | Value | |
| Title |
Modelling and Analysis of MEMS Thermal Actuator
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| Creator |
Dutta, Soma
Raja, S Rajappa, S Medar, MH |
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| Subject |
Aeronautics (General)
Structural Mechanics |
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| Description |
This report presents the design and comparative performance evaluation of two hot arm asymmetrical electrothermal micro actuators. Also this report confers detail on a polysilicon thermal actuator designed with two hot arm and one cold arm of different length and width based on asymmetrical thermal expansion of two beams caused by ohmic heating. Because of the interference of the different heat transfer modes (such as conduction, convection, and radiation), the motion simulation becomes complex. This work reveal a good understanding of the phenomena during a Joule heating process for micro-systems and the development of an analytical model and a finite element analysis. Comparisons between analytical and numerical simulation results validate the steady-state conditions.
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| Publisher |
National Aerospace Laboratories
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| Type |
Proj.Doc/Technical Report
NonPeerReviewed |
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| Identifier |
Dutta, Soma and Raja, S and Rajappa, S and Medar, MH Modelling and Analysis of MEMS Thermal Actuator. Project Report. National Aerospace Laboratories, Bangalore, India.
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| Relation |
http://nal-ir.nal.res.in/9784/
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