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ZnO thin film as methane sensor

IR@CGCRI: CSIR-Central Glass and Ceramic Research Institute, Kolkata

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Title ZnO thin film as methane sensor
Creator Mitra, P
Mukhopadhyay, Anoop Kumar
Subject Electronics
Description Methane (CH4) sensitivity of zinc oxide (ZnO) thin film has been studied in the present work. The sensor element comprises of a chemically fabricated ZnO semiconducting layer and a layer of palladium (Pd) as catalyst. The catalyst layer was formed on the surface of semiconducting ZnO following a wet chemical process from palladium chloride (PdCl2) solution. Fundamental features of a sensor element e.g. sensitivity, response time and recovery process has been studied. The effect of operating temperature on performance of the sensor material has been investigated and a choice of optimum temperature was made at around 200 degrees C. The sensor element exhibited reasonable sensitivity of about 86% at this temperature in presence of 1 vol% methane (CH4) in air.
Publisher Polish Academy of Sciences
Date 2007-09
Type Article
Format application/pdf
Identifier http://cgcri.csircentral.net/510/3/anoop.pdf
Mitra, P and Mukhopadhyay, Anoop Kumar (2007) ZnO thin film as methane sensor. Bulletin of the Polish Academy of Sciences-Technical Sciences , 55 (3). pp. 281-285. ISSN 0239-7528
Relation http://cgcri.csircentral.net/510/